• HyTan NEG-Ion pump, 600 series NEG module, Ø98 mm body with 6 CFF flange and SAFECONN high-voltage feedthrough
  • HyTan NEG-Ion pump, 1000 series NEG module, Ø98 mm body with 6 CFF flange and SAFECONN high-voltage feedthrough
  • HyTan NEG-Ion pump, 1500 series NEG module, Ø98 mm body with 6 CFF flange and SAFECONN high-voltage feedthrough
  • HyTan NEG-Ion pump, 2000 series NEG module, Ø98 mm body with 6 CFF flange and SAFECONN high-voltage feedthrough
  • Exploded view of a HyTan NEG-Ion pump showing the NEG module, ion pump module, flange, and feedthrough assembly
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HyTan NEG-Ion Pumps (Ø98 mm)

HyTan NEG-Ion Pumps (Ø98 mm)

Specifications

Part number 600HS20CV6SCN
Gamma part number 600HS-20CV-6-SC-N

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Technical specifications

600 Series

    600HS-20CV 600HS-20DI 600HP-20CV 600HP-20DI
Pumping speed1 (l/s) H2 725
CO 351 346 351 346
N2 220 216 220 216
Ar 0.2 2 0.2 2
CH4 85
Sorption capacity2 (Torr l) H2 1700 2800
CO 1 2
N2 0.4 2
Getter mass (g) 170 280
NEG max power3 (W) 250
NEG max current (A) 7.5
SIP max voltage4 (kV) 7
Flange options DN 100 CF (6"), DN 160 CF (8")
SIP feedthrough options SC, FI
Pump weight, DN 100 CF (kg) 2.7 2.8 2.7 2.9
Pump weight, DN 160 CF (kg) 3.7 3.8 3.7 3.9
Max bake temperature5 (°C) 300

1000 Series

    1000HS-20CV 1000HS-20DI 1000HP-20CV 1000HP-20DI
Pumping speed1 (l/s) H2 1000
CO 501 496 501 496
N2 295 291 295 291
Ar 0.2 2 0.2 2
CH4 85
Sorption capacity2 (Torr l) H2 2700 4500
CO 1.3 5.0
N2 0.6 3.8
Getter mass (g) 270 450
NEG max power3 (W) 350
NEG max current (A) 7
SIP max voltage4 (kV) 7
Flange options DN 100 CF (6"), DN 160 CF (8")
SIP feedthrough options SC, FI
Pump weight, DN 100 CF (kg) 2.8 2.9 3.0 3.1
Pump weight, DN 160 CF (kg) 3.8 3.9 4.0 4.1
Max bake temperature5 (°C) 300

1500 Series

    1500HS-20CV 1500HS-20DI 1500HP-20CV 1500HP-20DI
Pumping speed1 (l/s) H2 1500
CO 751 796 751 796
N2 445 441 445 441
Ar 0.2 2 0.2 2
CH4 85
Sorption capacity2 (Torr l) H2 4500 7500
CO 1.3 1.8
N2 0.6 0.7
Getter mass (g) 450 750
NEG max power3 (W) 450
NEG max current (A) 6.5
SIP max voltage4 (kV) 7
Flange options DN 100 CF (6"), DN 160 CF (8")
SIP feedthrough options SC, FI
Pump weight, DN 100 CF (kg) 3.1 3.2 3.4 3.4
Pump weight, DN 160 CF (kg) 4.1 4.2 4.4 4.4
Max bake temperature5 (°C) 300

2000 Series

    2000HS-20CV 2000HS-20DI 2000HP-20CV 2000HP-20DI
Pumping speed1 (l/s) H2 2000
CO 1101 1096 1101 1096
N2 670 666 670 666
Ar 0.2 2 0.2 2
CH4 85
Sorption capacity2 (Torr l) H2 7500 12000
CO 10 13
N2 14 15
Getter mass (g) 720 1200
NEG max power3 (W) 600
NEG max current (A) 6
SIP max voltage4 (kV) 7
Flange options DN 100 CF (6"), DN 160 CF (8")
SIP feedthrough options SC, FI
Pump weight, DN 100 CF (kg) 3.5 3.5 3.9 4.0
Pump weight, DN 160 CF (kg) 4.5 4.5 4.9 5.0
Max bake temperature5 (°C) 300

1 Contribution of H2 pumping speed by the SIP module is not reported. CO / N2 pumping speed is the summation of the NEG module's initial speed and the SIP module's nominal speed. Ar / CH4 pumping speed is measured with an active NEG module.
2 H2: embrittlement limit (10 Torr l/g); CO / N2: single-run capacity.
3 Not including transmission losses.
4 Applied voltage should not exceed this value, unless directed by Gamma Vacuum.
5 Without power cables connected. When connected, refer to the max operating temperature of the power cables and connectors.