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Vacuum System Information

Service Request Details

Product Information

Ultimate Pressure:
Gauge Pressure:
Ion Pump Pressure:
Ion Pump Current:

Describe the nature of the Service Request in as much detail as possible:

Ion Pump:		Serial Number:
Controller:		Serial Number:
Other:		Serial Number:

Application Information

Contamination & Hazardous Substance Status

Please describe your application, including the specific technology, process gases and other relevant details as they pertain to the vacuum environment:

Contaminants to vacuum systems are defined as: any substance that, because of its properties, is not compatible with ultra-high vacuum (UHV) operation. Some of these are: silicon (in the form of silicones), sulfur, cadmium, fluorine and chlorine. Contaminants have been determined by vapor pressure curves and/or properties that are detrimental to the operation of UHV products.

Hazardous Substance Definition*

*Hazardous Substance Definition

A chemical or substance, or mixture of chemicals or substances, which:

is regulated by the Federal Occupational Safety and Health Administration under Code of Federal Regulations, title 29, part 1910, subpart Z
is either toxic or highly toxic, an irritant, corrosive, a strong oxidizer, a strong sensitizer, combustible, either flammable or extremely flammable, dangerously reactive, pyrophoric, a carcinogen, a teratogen, a mutagen, a reproductive toxic agent, or that otherwise, according to generally accepted documented medical or scientific evidence, may cause substantial acute or chronic personal injury or illness during or as a direct result of any customary or reasonably foreseeable accidental or intentional exposure to the chemical or substance. (Common examples: arsenic, cadmium, gallium, cesium, mercury, radiation, etc.)

Has Not Been Exposed

Has Been Exposed