Over the years several authorities have provided specifications and methods for determining the pumping speed of capture technology vacuum pumps. The industry has settled on ISO/DIS 3556-1-1992.

Several key points to note in this specification include:

• The ion pump is required to be fully saturated after pressure stabilization
• There is no method provided for testing ion pumps in an unsaturated state
• This method does not allow for testing of ion pumps below 10 l/s
• This test method specifically calls for the use of nitrogen and is subject to interpretation for other gases

For additional information on speed testing of ion pumps, please contact us directly.